As the integrated circuit (IC) undergoes the continuous downscaling according to the Moore’s law, interconnect reliability has become crucial and affected the performance, power consumption and reliability of the whole circuit. Especially, the interconnect reliability of IC can directly determine the quality of communication. In order to understand the present situation and trend of interconnect reliability, a comprehensive review is necessary. Especially, a brief history and the future trend of interconnect system are summarized by some statistic surveys. All these can provide important guidance for the new researchers of this area.
